Facilities

Facilities

Vacuum deposition

Vacuum deposition

Electron beam and magnetron deposition of thin films, as well as chemical vapor deposition

Magnetron deposition

Electron beam deposition

vapor deposition

News

Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics

The device has an accuracy at the level of world leaders - no worse than 5% in the range of 0-30 µl / min

SEM image taken at FMN Laboratory took 2nd place in the microimage competition

Defects obtained in the silicon etching process have become artistic

Evolutionary selection growth of silver films for low-loss nanophotonic devices

A new method of the e-beam evaporation has been demonstrated

Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidth

Unique technology by FMN Lab for nonlinear photonics and neural networks

Open Doors Day at FMN Lab

Команда центра приглашает студентов МГТУ им. Н.Э. Баумана на День открытых дверей

Deep multilevel wet etching of fused silica glass microstructures in BOE solution

New material in Scientific reports