Scanning reflectometry

Spectroscopic scanning reflectometer


The setup is designed to control the thickness of single-layer and multi-layer coatings, determine the optical constants of single-layer and multi-layer coatings in the wavelength range from 430 to 930 nm, and to control the uniformity of thickness of the analyzed coating.

Key features and capabilities:

  • spectral range: 430 - 930 nm;
  • range of measured thicknesses: from 20 nm to 50 microns;
  • light spot diameter: 80 microns;
  • measurement accuracy: 1 nm;
  • measurement error (1σ): no worse than 0.3 nm;
  • measurement time: from 300 ms;
  • a motorized table for measurements according to the program.