Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics
The device has an accuracy at the level of world leaders - no worse than 5% in the range of 0-30 µl / min
Spectroscopic scanning reflectometer
The setup is designed to control the thickness of single-layer and multi-layer coatings, determine the optical constants of single-layer and multi-layer coatings in the wavelength range from 430 to 930 nm, and to control the uniformity of thickness of the analyzed coating.
Key features and capabilities: