Exhaust system for working with organic chemistry

The system is designed to carry out liquid processing of plates, as well as pieces of plates in organic solutions.

Key features and capabilities:

exhaust system;

possible processes of washing and cleaning the plates: acetone - isopropyl alcohol - deionized water;

possible processes of manifestation and removal of electronic and photoresists: a wide range of developers and organic solvents from manufacturers of electronic and photoresists;

possible processes of explosive lithography: a wide range of organic solvents and solutions for the removal of electronic and photoresists.

Work published

Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics

The device has an accuracy at the level of world leaders - no worse than 5% in the range of 0-30 µl / min

SEM image taken at FMN Laboratory took 2nd place in the microimage competition

Defects obtained in the silicon etching process have become artistic

Work published

Evolutionary selection growth of silver films for low-loss nanophotonic devices

A new method of the e-beam evaporation has been demonstrated

Work published

Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidth

Unique technology by FMN Lab for nonlinear photonics and neural networks