
Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics
The device has an accuracy at the level of world leaders - no worse than 5% in the range of 0-30 µl / min
Exhaust systems for working with inorganic chemistry
The systems are designed to carry out the processes of liquid processing of plates with diameters of 100 and 200 mm, as well as pieces of plates. The processes of liquid processing include liquid washing of the surface and etching of the plates in solutions of acids and alkalis.
Exhaust systems are divided into two subsystems: for ion-containing materials and for non-ionic materials, which are separate installations.
Key features and capabilities: