New feature in ITM Web of Conferences

29 december 2020

The publication provides a comparative analysis of new product development principles in microelectronics, mechanical engineering, and MEMS production is carried out. A MEMS integrated digital modeling approach is proposed based on the formation of a knowledge base, including a description of basic structural elements and basic tested process sequences for their manufacture.

MEMS chip.jpg

Thermoelectric MEMS switches


Digital design as a key approach to shortening MEMS development cycle

Mihail M. Andronic, Ilya A. Rodionov, Yuriy B. Tsvetkov

ITM Web Conf. Volume 35, 2020

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