New feature in ITM Web of Conferences

The publication provides a comparative analysis of new product development principles in microelectronics, mechanical engineering, and MEMS production is carried out. A MEMS integrated digital modeling approach is proposed based on the formation of a knowledge base, including a description of basic structural elements and basic tested process sequences for their manufacture.

Thermoelectric MEMS switches

***

Digital design as a key approach to shortening MEMS development cycle

Mihail M. Andronic, Ilya A. Rodionov, Yuriy B. Tsvetkov

ITM Web Conf. Volume 35, 2020

https://www.itm-conferences.org/articles/itmconf/abs/2020/05/itmconf_itee2020_01003/itmconf_itee2020_01003.html