FUNCTIONAL 
The publication provides a comparative analysis of new product development principles in microelectronics, mechanical engineering, and MEMS production is carried out. A MEMS integrated digital modeling approach is proposed based on the formation of a knowledge base, including a description of basic structural elements and basic tested process sequences for their manufacture.
Thermoelectric MEMS switches
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Digital design as a key approach to shortening MEMS development cycle
Mihail M. Andronic, Ilya A. Rodionov, Yuriy B. Tsvetkov
ITM Web Conf. Volume 35, 2020
Work published 
Work published 
Work published 
